| 摘要 |
PROBLEM TO BE SOLVED: To obtain a processing agent replenishing apparatus in which high detergency can be assured, even when the water pressure is weak. SOLUTION: When a cleaning fluid is supplied to a liquid flow path 38, the cleaning fluid flows to a diffusion section 96, while the cleaning fluid draws approximately two spiral flows along the two spiral grooves formed between a whirler 94 and an inner wall of the liquid flow path 38. In the diffusion section 96, substantially two spiral flows collide against each other and are stirred. The cleaning fluid, spreading in a conical form, is injected from a jet orifice 96 and cleans the interior of a vessel. COPYRIGHT: (C)2006,JPO&NCIPI
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