| 摘要 |
PROBLEM TO BE SOLVED: To prevent a trouble by intrusion of dust, minute foreign matter or the like. SOLUTION: A frame body 28 is formed in a rectangular frame shape having a horizontal and vertical outer shape substantially equal to those of support substrates 1 and 2. A bonding part 29 composed of aluminum for bonding the support substrate 2 is formed on the reverse side of the frame body 28. Accordingly, only by bonding the support substrate 1 to the reverse side of the frame body 28 in the bonding part 29 and anode-bonding the support substrate 2 to the surface side of the frame body 28, a weight part 21, a spring part 22, support parts 23<SB>1</SB>and 23<SB>2</SB>, a stopper 25, a movable electrode 21a and the like can be entirely sealed by the two support substrates 1 and 2 and the frame body 28. Thus, intrusion of minute dust, foreign matter or the like to the inside is prevented, and a trouble, such that displacement of the weight part 21 is intervened by such foreign matter, can be thus prevented to improve the reliability. COPYRIGHT: (C)2006,JPO&NCIPI
|
