| 摘要 |
PROBLEM TO BE SOLVED: To simplify the control of an anode to reduce a production cost, and to improve a circulating property of a plating liquid to increase a treatment speed. SOLUTION: The plating apparatus comprises: a fixed drum 20 having an anode 21 on its outer surface exposed outward; a rotation drum which is arranged on a circumference of the fixed drum and feeds a workpiece W in a longitudinal direction while winding the workpiece around itself; an annular opening 35 which is formed in the bottom of the rotation drum, is continuous in a circumferential direction of the rotation drum and penetrates from the outer surface to the inner surface of the rotation drum; a plating-liquid-feeding path 22 that penetrates inside the fixed drum and opens at such a position on the outer surface of the fixed drum as to correspond to a position 52a in a predetermined winding angle range of the rotation drum; a tunnel-shaped space 52 for a liquid channel, which is surrounded by the workpiece wound around the outer surface of the rotation drum, a peripheral wall of the annular opening and the outer surface of the fixed drum; and a plating-liquid-feeding system for feeding the plating liquid to the liquid channel. COPYRIGHT: (C)2006,JPO&NCIPI
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