摘要 |
An optical microscope includes a light source irradiating a sample with an illuminating light; a mirror having a variable reflection surface for reflecting the illuminating light; a correction table storing data of plural shapes of the reflection surface which correspond to changes in a focal position and an aberration; and a controller selecting from the plural shapes of the reflection surface a reflection surface suitable for corrections of the focal position and aberration, and controlling the mirror so that the selected reflection surface is formed.
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