| 摘要 |
A flow regulating device, comprising a housing (19) having a first chamber (21) communicating with an inlet port (11) and a second chamber (22) communicating with an outlet port (12), a tubular part (25) extending into the second chamber and allowing the first chamber to communicate with the second chamber, a valve seat (61) formed at the tip (25a) of the tubular part, and a valve element (32) opening and closing the valve seat. At least one of the valve seat and the valve element is formed of a material with a thermally deformation amount smaller than that of a material forming the tubular part. Accordingly, the flow of a high temperature and high pressure fluid can be regulated stably. Also, a pressure chamber (29) communicating with the second chamber and having a pressure port (18) is formed in the housing and the device may comprise first and second flexible separating means (41, 51) connected to each other for separating the second chamber from the pressure chamber and a bed (75) disposed between the separating means. A reinforcement member (90) may be buried in the tubular part (25). |
