| 摘要 |
<p>An opto-electronic apparatus comprising a base layer, one or more photonic elements positioned on the base layer, and an optical layer suspended over the base layer, the optical layer including a moveable optical element positioned over at least one of the photonic elements. A process comprising forming a base layer, placing one or more photonic elements on the base layer, and suspending an optical layer over the photonic elements on the base layer, the optical layer including a moveable optical element.</p> |
