| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide imaging optics in which color aberration is favorably corrected even for light in a wavelength region including j-line (at 313 nm). <P>SOLUTION: The imaging optics K1, K2 for imaging an image on a first plane M onto a second plane P include at least three combinations of: first transmissive optical members G1, G3, G7 comprising a fluoride: and second transmissive optical members G2, G4, G8 disposed adjacent to the first transmissive optical members G1, G3, G7, respectively and having different dispersions from those of the first optical members G1, G3, G7. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
