| 摘要 |
PROBLEM TO BE SOLVED: To provide a work carrying apparatus capable of surely preventing the leak of washing liquid and a washing gas in a washing area to a non-washing area. SOLUTION: The work carrying apparatus carries works for their washing. The apparatus includes a roller carrying shaft 5 provided with rollers, a driven-side magnet 11 mounted to the tip of the roller carrying shaft 5 that are arranged in a processing tank isolated from the outside by a barrier 3 and a cover, and includes, outside the tank, a drive-side magnet 15 arranged opposite to the driven-side magnet 11 via a thin film 13 for closing a through-hole 14 formed to the barrier 3, a drive shaft 20 coupled to the drive-side magnet 15, a transmission shaft coupled to the drive shaft 20 via a worm gear 21, and a motor to which the transmission shaft is coupled. COPYRIGHT: (C)2006,JPO&NCIPI
|
