| 摘要 |
PROBLEM TO BE SOLVED: To facilitate contact of a solution with a receptor. SOLUTION: The surface acoustic wave sensor 10 comprises an exciting IDT 14 composed of a screen-like electrode generating a surface acoustic wave in a piezoelectric substrate 12, which is provided on the surface of the piezoelectric substrate 12. A receiving IDT 16 composed of a screen-like electrode receiving the surface acoustic wave excited by the exciting IDT 14 is also provided on the surface of the substrate 12. The receptor 22 is provided in an exposed state between the IDT 14 and the IDT 16 that corresponds to the propagating area of surface acoustic wave. The IDT 14 and the IDT 16 are covered with an electrode sealing member 24. The sealing member 24 forms a closed space in the circumference of the screen-like electrodes. COPYRIGHT: (C)2006,JPO&NCIPI
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