| 摘要 |
PROBLEM TO BE SOLVED: To provide precision machining device and method for performing accurate grinding by switching and controlling a device for rotating a grinding tool, for instance, by moving amount and stepwise constant pressure according to a grinding stage. SOLUTION: A feed screw mechanism 4 constituted of at least a feed screw 41 and a nut 42 and an actuator 5 are mounted on a second base 3 for supporting the rotating device 6b for rotating the grinding tool b. At a rough grinding stage, moving adjustments of the rotating device 6b and the second base 3 are performed by moving the nut 42 by prescribed quantity. At an extra-precision grinding stage, moving adjustments of the rotating device 6b and the second base 3 are performed by performing a pressure control, while stepwisely using a plurality of pneumatic actuators 5a and 5b of different pressure performance. An attitude control device 7 is interposed between a rotating device 6a for rotating an object a to be ground and a first base 2. COPYRIGHT: (C)2006,JPO&NCIPI
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