发明名称 SUBSTITUTION PLATING BATH OF BISMUTH FOR COPPER BASED STOCK MATERIAL
摘要 PROBLEM TO BE SOLVED: To form a white and dense bismuth film during the substitution plating of bismuth on a copper based stock material. SOLUTION: In the substitution plating bath of bismuth, soluble bismuth salt and base acid are contained, while a specified thio-amino carboxylic acid or its salt (methionine or the like), an aliphatic mercaptocarboxylic acid or its salt (such as mercaptosuccinic acid), sulfides (thiodiglycol, 4, 7-dithiadecane-1, 10-diol or the like), and thiouria derivative (1, 3-bis(3-pyridylmethyl)-2-thiourea or the like) is selected for a copper dissolving agent. Since the specified sulfur-containing compound is used for the copper dissolving agent, the electrode potential difference between the complexed copper ion and bismuth ion can be adequately adjusted, and a white and dense bismuth film can be obtained thereby. COPYRIGHT: (C)2006,JPO&NCIPI
申请公布号 JP2006183079(A) 申请公布日期 2006.07.13
申请号 JP20040376489 申请日期 2004.12.27
申请人 ISHIHARA CHEM CO LTD 发明人 HAGA MASAKI;NISHIKAWA TETSUJI;TANAKA KAORU;INAI SHOYA
分类号 C23C18/31;H01L21/288;H05K3/18 主分类号 C23C18/31
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