| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method for a powdery complex metal oxide, in which the powdery complex metal oxide having fine particle diameters and having a uniform composition is manufactured in a vapor phase process. SOLUTION: The manufacturing method has: a mixing step, in which a powdery mixture is obtained by mixing powders of two or more metal compounds in an inert gas atmosphere having a dew point of≤-40°C; a vaporizing step, in which the mixed steam of the above metals are generated by continuously feeding the powdery mixture by a specified amount per unit time into a vaporization chamber to vaporize the powdery mixture; and a powder manufacturing step, in which the powdery complex metal oxide is manufactured by feeding the mixed steam into a reaction chamber to carry out the thermal decomposition reaction of the mixed steam in the reaction chamber. COPYRIGHT: (C)2006,JPO&NCIPI
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