| 发明名称 |
Piezoelectric element, ink-jet head with same, and their manufacturing methods |
| 摘要 |
A piezoelectric element 1 includes a lower electrode 2 , a piezoelectric film 3 and an upper electrode 4 stacked in this order. The surface of the upper electrode 4 of the piezoelectric element 1 is exposed to a zirconium compound 6.
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| 申请公布号 |
US2006152553(A1) |
申请公布日期 |
2006.07.13 |
| 申请号 |
US20050539679 |
申请日期 |
2005.06.16 |
| 申请人 |
MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD. |
发明人 |
NAKAGAWA TOHRU;TORII HIDEO |
| 分类号 |
B41J2/045;B41J2/14;B41J2/16;H01L41/04;H01L41/22 |
主分类号 |
B41J2/045 |
| 代理机构 |
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