MULTI-TRACK MAGNETRON EXHIBITING MORE UNIFORM DEPOSITION AND REDUCED ROTATIONAL ASYMMETRY
摘要
<p>A multi-track magnetron having a convolute shape and asymmetric about the target center (14) about which it rotates. A plasma track (166) is formed as a closed loop between opposed inner magnetic pole (162) and outer magnetic pole (164), preferably as two or three radially arranged and spirally shaped counter-propagating tracks with respect to the target center and preferably passing over the rotation axis. The pole shape may be optimized to produce a cumulative track length distribution conforming to the function L=ar</p>
