发明名称 ILLUMINATION OPTICAL DEVICE
摘要 <P>PROBLEM TO BE SOLVED: To provide a simple illumination optical device capable of adjusting the illuminance distribution on the light illuminated surface, without accompanying change in the focal distance and back focusing of a condenser lens. <P>SOLUTION: A first optical system 12 that does not have refractive power and a second optical system 13 that has positive refractive power are arranged, in the order starting from a light source 11 side toward the light illuminated surface 10A. The first optical system 12 has a variable relative position (for example, an interval d<SB>2</SB>), with respect to the second optical system 13 and is an optical system for adjusting an illuminance distribution on the light illuminated surface. <P>COPYRIGHT: (C)2006,JPO&NCIPI
申请公布号 JP2006184443(A) 申请公布日期 2006.07.13
申请号 JP20040376572 申请日期 2004.12.27
申请人 NIKON CORP 发明人 NAKAJIMA YASUHARU
分类号 G02B19/00;H01L21/027 主分类号 G02B19/00
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