| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for manufacturing a black matrix substrate having a black matrix of bilayer structure at a low cost. <P>SOLUTION: A liquid repellent layer 42 is formed by using an electrostatic attraction type ink jet apparatus 61. Since exposure/development is dispensed with thereby, the number of processes can be reduced and further a liquid repellent material 42A can be saved and consequently the black matrix substrate 21 can be manufactured at a low cost. Further since development of the liquid repellent layer 42 is dispensed with, damage of a light shielding layer 41 can be suppressed. The liquid repellent material 42A which is not a resist material can also be used. Moreover a pattern of the liquid repellent layer 42 with very narrow width (slender lines with ≤25μm width) can be easily formed on the light shielding layer 41 by setting a pore diameter of an ejection pore 62 of the ink jet apparatus 61 to be 0.01μm to 25μm. Accordingly width of the black matrix 25 can be made small. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
