| 摘要 |
PROBLEM TO BE SOLVED: To provide a simplified substrate transfer apparatus capable of transferring a substrate with reliability and desirably applicable to a large substrate, and to provide a substrate transfer method. SOLUTION: The substrate transfer apparatus 1 comprises a conveyor 40 disposed at an intermediate position M1 between a first device 101 and a second device 102, and an arm mechanism 20 for transferring the substrate P between the intermediate position M1 and the second device 102. The arm mechanism 20 has a rodlike member 21 for supporting the substrate P, a base 30 to which part of the rod shape member 21 is fixed, and a transfer assist member 35 for assisting the transfer of the substrate P by the conveyor 40 provided on the base 30. COPYRIGHT: (C)2006,JPO&NCIPI
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