| 摘要 |
PROBLEM TO BE SOLVED: To evenly get a treated gas across the whole area of a substrate to be processed that is mounted on a substrate mounting platform, and control the heat transfer coefficient between the substrate and the substrate mounting platform, thus making the temperature of the substrate uniform across its whole surface. SOLUTION: A carbon material 4 is used as a porous material having many continuous small holes for a substrate mounting platform 1 on which a substrate 12 to be processed is controlled under a specified temperature, the substrate mounted on it and arranged in a vacuum vessel 2. The porous carbon material 4 has many continuous holes formed in every direction in a carbon substrate, and a gas 9 for treatment passes through these continuous holes spreading evenly from the lower side and blowing out to the upper side. An electrostatic zipping electrode 5 is buried in the porous carbon substrate 4, and the outer periphery of this electrostatic zipping electrode 5 and porous carbon substrate 4 is covered by a thermostable insulating film 8 of ceramics and the like. COPYRIGHT: (C)2006,JPO&NCIPI |
