| 摘要 |
PROBLEM TO BE SOLVED: To prevent entrance of moisture, dust and the like into a drive part and to prevent adhesion of moisture to a guide member holding a valve body. SOLUTION: The drive part 14 formed in a valve base section 12 is connected with a diaphragm 60 connected to the valve body 16. The drive part 14 is supplied with negative pressure fluid and thereby the valve body 16 is displaced along an axial direction. The drive part 14 includes a first casing 26 connected to an upper part of the valve base section 12. A side surface of the first casing 26 is formed with a plurality of air windows 52 spaced at predetermined distances along a circumferential direction and a plurality of drain holes 58 are formed in a lower part of the first casing 26 connected to the valve base section 12 along the circumferential direction. COPYRIGHT: (C)2006,JPO&NCIPI
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