| 发明名称 |
HOLDER WITH POROUS GRIPPER |
| 摘要 |
The invention relates to a gripper for the transport of workpieces, above all of planar workpieces, in particular, of wafers (6). The workpiece retaining force is mostly applied by vacuum. The application of the vacuum to the workpiece is achieved by means of a porous surface (2). |
| 申请公布号 |
WO2006072453(A1) |
申请公布日期 |
2006.07.13 |
| 申请号 |
WO2005EP14133 |
申请日期 |
2005.12.30 |
| 申请人 |
SUPFINA GRIESHABER GMBH & CO. KG;KEIPKE, ROY;MUELLER, CHRISTOPH |
发明人 |
KEIPKE, ROY;MUELLER, CHRISTOPH |
| 分类号 |
H01L21/683;B25B11/00 |
主分类号 |
H01L21/683 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
