| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a substrate processing device capable of improving the accuracy of height position and effectively performing teaching while reducing the processes by visual check and manual labor of a worker at the time of teaching in comparison with the conventional way, and to provide its conveyance alignment method. <P>SOLUTION: The height difference between the mapping sensor 32 of a conveyance mechanism 30 and a substrate conveyance arm 33 and a substrate conveyance arm 34 is detected by an arm position detection sensor 40. Further, the height position of jigs 38 and 39 for Z-axis teaching is detected by the mapping sensor 32. Moreover, the access height to each part of the substrate conveyance arm 33 and the substrate conveyance arm 34 is calculated on the basis of the height position difference between the jigs 38 and 39 for Z-axis teaching, the mapping sensor 32, the substrate conveyance arm 33 and the substrate conveyance arm 34. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
