| 摘要 |
PROBLEM TO BE SOLVED: To provide a cantilever sensor system capable of efficiently performing measurement in a plurality of cantilever sensors by use of a single laser emitting device. SOLUTION: Laser beam emitted from the laser emitting device is linearly converged by a cylindrical lens or the like and radiated onto the plurality of cantilever sensors as input light, and an irradiating position change on a light receiving element of the laser beam reflected by the cantilever sensor is detected, whereby the displacement caused in the cantilever is detected. As the light receiving element, a CCD or CMOS light receiving element, and measurement is performed by analyzing an image obtained from the light receiving element. COPYRIGHT: (C)2006,JPO&NCIPI
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