发明名称 |
Semiconductor manufacturing apparatus |
摘要 |
A semiconductor manufacturing apparatus includes: a calculation unit having at least one computer for processing semiconductor design information; a control unit for controlling radiation of an electron in accordance with a processing result of the semiconductor design information; a writing unit for radiating an electron in accordance with instructions of the control unit; and at least one storage device. The semiconductor manufacturing apparatus permits a communication between the storage device, the calculation unit, the control unit, and the writing unit. The semiconductor manufacturing apparatus further includes a communication pass through which the storage device can be controlled. |
申请公布号 |
US2006155414(A1) |
申请公布日期 |
2006.07.13 |
申请号 |
US20060371677 |
申请日期 |
2006.03.08 |
申请人 |
HITACHI HIGH-TECHNOLOGIES CORPORATION |
发明人 |
NAYA HIDEMITSU;HASHIMOTO KOJI;KAWANO MASAMICHI;TOMIYOSHI RIKIO |
分类号 |
G03F1/08;G06F19/00;G03F1/84;G03F1/86;G03F7/20;H01J37/302;H01J37/317;H01L21/02;H01L21/027 |
主分类号 |
G03F1/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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