发明名称 PHOTO-RESIST COMPOSITION, AND METHOD FOR FORMING PATTERNS IN SEMICONDUCTOR PROCESSING USING THE SAME
摘要 <p>The photoresist composition of the present invention includes a solvent mixture, a resin, a photo acid generator, and a quencher, the solvent mixture comprising a first solvent containing an ether compound and a second solvent having a polarity stronger than the first solvent, wherein an amount of the first solvent is in a range of about 61% to about 79% by weight, and an amount of the second solvent is in a range of about 21% to about 39% by weight based on a total weight of the solvent mixture.</p>
申请公布号 KR100599081(B1) 申请公布日期 2006.07.13
申请号 KR20040037634 申请日期 2004.05.27
申请人 发明人
分类号 G03F7/004;G03C1/492;G03F7/039 主分类号 G03F7/004
代理机构 代理人
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