发明名称 |
Method of producing fluorite crystal, fluorite and optical system incorporating the same |
摘要 |
There is provided a method of forming a fluorite crystal and an exposure apparatus including this fluorite crystal. A method of manufacturing a device using the exposure apparatus is also provided.
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申请公布号 |
US2006153263(A1) |
申请公布日期 |
2006.07.13 |
申请号 |
US20060358103 |
申请日期 |
2006.02.22 |
申请人 |
CANON KABUSHIKI KAISHA |
发明人 |
OOKUBO KENJI |
分类号 |
G01N21/00;G01N27/62;C30B11/00;C30B29/12;G01N1/28;G01N21/73;G01N21/75;G02B1/02;G03F7/20;H01S3/223 |
主分类号 |
G01N21/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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