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发明名称
FABRICATION METHOD OF SI FILM
摘要
申请公布号
KR20060081296(A)
申请公布日期
2006.07.12
申请号
KR20050001946
申请日期
2005.01.08
申请人
SAMSUNG CORNING CO., LTD.
发明人
HAN, JAI YONG
分类号
H01L21/36;H01L21/324;H01L21/363;H01L21/365
主分类号
H01L21/36
代理机构
代理人
主权项
地址
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