| 发明名称 |
METHOD AND APPARATUS FOR FLUID PROCESSING A WORKPIECE |
| 摘要 |
A method of fluid sealing a workpiece is provided. The method includes placing a workpiece on a ring, engaging at least one engagement feature of the ring with at least one retaining feature defined by the member and flexing the member to provide a force to the at least one engagement feature to cause the ring to form a barrier to fluid entry with the workpiece. |
| 申请公布号 |
EP1678352(A2) |
申请公布日期 |
2006.07.12 |
| 申请号 |
EP20040796198 |
申请日期 |
2004.10.22 |
| 申请人 |
NEXX SYSTEMS, INC. |
发明人 |
KEIGLER, ARTHUR;LIU, ZHENQUI;HARRELL, JOHN;WU, QUNWEI |
| 分类号 |
B23K15/00;C25D5/18;C25D5/22;C25D7/12;C25D17/00;C25D21/10;C25D21/12;H01L21/00 |
主分类号 |
B23K15/00 |
| 代理机构 |
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