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发明名称
VACUUM SYSTEM AND VACUUM DETECTING METHOD USING THE SAME
摘要
申请公布号
KR20060081155(A)
申请公布日期
2006.07.12
申请号
KR20050001612
申请日期
2005.01.07
申请人
SAMSUNG ELECTRONICS CO., LTD.
发明人
KWON, SOON HO;PARK, KWON SIK;KU, SOUNG CHANG
分类号
G02F1/13
主分类号
G02F1/13
代理机构
代理人
主权项
地址
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