Doping method and semiconductor device fabricated using the method

摘要

A doping method includes the step of attaching molecules or clusters (7) to the surface of a semiconductor substrate (3) to enable charge transfer from the molecules or clusters to the substrate surface, thereby inducing carriers underneath the substrate surface. A semiconductor device is fabricated through attachment of molecules or clusters to the surface of a semiconductor substrate. The attachment enables charge transfer from the molecules or clusters to the substrate surface to induce carriers underneath the substrate surface.