| 摘要 |
In order to control an internal pressure of an air spring appropriately without being influenced by a change in supply pressure, an anti-vibration system includes an air spring as an actuator for an anti-vibration table, a pressure control valve for controlling the internal pressure of the air spring, a pressure sensor for detecting the air supply pressure to the pressure control valve, a driving system for actuating the pressure control valve in accordance with a detection signal of the pressure sensor, and a variable gain compensation system for performing variable gain compensation to an input signal to the driving system for the pressure control valve, on the basis of the detection signal of the pressure sensor.
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