发明名称 |
Methods and apparatus for attaching getters to MEMS device housings |
摘要 |
A method for reducing occurrences of loose gettering material particles within micro-electromechanical system (MEMS) devices is described. The MEMS devices include a micro-machine within a substantially sealed cavity formed by a housing and a cover for the housing. The cavity containing a getter mounted on a getter substrate which is to be attached to the cover. The method includes providing an area between a portion of the cover and a portion of the getter substrate, positioning the getter within the area, and attaching the getter substrate to the cover.
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申请公布号 |
US7074636(B2) |
申请公布日期 |
2006.07.11 |
申请号 |
US20050127388 |
申请日期 |
2005.05.12 |
申请人 |
HONEYWELL INTERNATIONAL INC. |
发明人 |
CURTIS HARLAN L.;GLENN MAX C.;DCAMP JON B.;DUNAWAY LORI A. |
分类号 |
H01L21/00;B81B7/00 |
主分类号 |
H01L21/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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