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发明名称
METHOD FOR CONTROLLING EFFUSION CELL OF DEPOSITION SYSTEM
摘要
申请公布号
KR20060080679(A)
申请公布日期
2006.07.11
申请号
KR20050001084
申请日期
2005.01.06
申请人
SAMSUNG SDI CO., LTD.
发明人
HWANG, MIN JEONG;KIM, DO GEUN;SONG, KWAN SEOP;AHN, JAE HONG
分类号
C23C14/54;C23C14/00
主分类号
C23C14/54
代理机构
代理人
主权项
地址
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