发明名称 Photochromic substrate container
摘要 A semiconductor wafer, substrate, or reticle storage or shipping device that includes a photochromic indicator of exposure to undesired electromagnetic radiation. The present invention includes the incorporation of a photochromic material into the plastic used to fabricate at least a portion of a semiconductor wafer, disk, or reticle shipping or storage containers. The container may include photochromic material in the form of a transparent window or a larger portion of the container. The photochromic material may change color or darkness in response to exposure to a selected range of wavelengths of light.
申请公布号 US7073667(B2) 申请公布日期 2006.07.11
申请号 US20040971556 申请日期 2004.10.22
申请人 ENTEGRIS, INC. 发明人 BURNS JOHN;FULLER MATTHEW A.;KING JEFFERY J.;FORBES MARTIN L.;SMITH MARK V.
分类号 B65D85/30;B65D79/02;B65D85/48;H01L21/673 主分类号 B65D85/30
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