| 摘要 |
The invention relates to the structural design of a substrate for specimens, to a method for the production thereof and to a device based thereon. The inventive substrate structural design makes it possible to carry out a method for comprehensively investigating thin films consisting in forming a thin-film specimen on a specifically constructed specimen table, which enables to prepare such a specimen and to carry out subsequent operations for the investigation thereof. In particular for investigating a given specimen, said method makes it possible to use devices such as optical, atomic-force and optical near field microscopes, an analyser based on an X-rayogram obtainable by means of a synchrotron radiation, transmission and scanning (raster) electron microscopes, etc., thereby making it possible to identify the concrete investigated specimen areas while the transfer thereof from one device to another one |
