MANUFACTURING METHOD OF MICRO MIRROR ARRAY AND OPTICAL DEVICE COMPRISING MICRO MIRROR

摘要

Provided are method of manufacturing a micromirror array and method of manufacturing an optical device having a micromirror. The method of manufacturing a micromirror array includes: forming an adhesion layer on a substrate and a magnetic layer on the adhesion layer; patterning the adhesion layer and magnetic layer; magnetizing the magnetic layer; forming a bonding layer on each side of the adhesion layer and the magnetic layer; severing the substrate into each unit including the adhesion layer, the magnetic layer, and the bonding layer; forming a mirror surface on a side of the substrate to form a unit macromirror suructure; and placing the unit micromirror structure in a holder to form a micromirror array.