DEPOSITON SYSTEM AND METHOD FOR MAKING LAYERS IN DEPOSITION SYSTEM,申请号KR20050000967-传众专利搜索

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发明名称	DEPOSITON SYSTEM AND METHOD FOR MAKING LAYERS IN DEPOSITION SYSTEM
摘要
申请公布号	KR20060080485(A)	申请公布日期	2006.07.10
申请号	KR20050000967	申请日期	2005.01.05
申请人	SAMSUNG SDI CO., LTD.	发明人	HWANG, MIN JEONG;JUNG, SUNG WHA;KANG, EU GENE
分类号	C23C14/24;C23C14/04	主分类号	C23C14/24
代理机构		代理人
主权项
地址

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