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发明名称
APPARATUS FOR SURFACE TREATMENT UTILIZING PLASMA SOURCE ION IMPLANTATION
摘要
申请公布号
KR20060079993(A)
申请公布日期
2006.07.07
申请号
KR20050000427
申请日期
2005.01.04
申请人
LEE, GON GU
发明人
LEE, GON GU
分类号
H01J37/30
主分类号
H01J37/30
代理机构
代理人
主权项
地址
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