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发明名称
HOT CATHODE ION GAGE
摘要
申请公布号
KR100598273(B1)
申请公布日期
2006.07.07
申请号
KR20020056931
申请日期
2002.09.18
申请人
发明人
分类号
G01L21/30
主分类号
G01L21/30
代理机构
代理人
主权项
地址
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