| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a manufacturing method of a substrate with microlenses capable of arbitrarily setting pattern shapes of a second aperture for etching and having such an advantage that the degree of freedom in designing the lens shape widens. <P>SOLUTION: The manufacturing method of the substrate with the microlenses has a recessed part forming process of forming a number of recessed parts each having the lens shape of a translucent substrate, and a microlens forming process of forming microlens parts by packing a medium varying in refractive index from the substrate into the recessed parts, in which the recessed part forming process has a process of forming a mask layer 2 of the translucent substrate, a process of forming the first aperture 20 for etching, a first etching process of forming the first recessed parts by etching the translucent substrate, a process of forming a second aperture 21 for etching, and a second etching process of forming second recessed parts having surface consisting of a plurality of different curved surfaces by bringing an etchant into contact with the inside surface of the first recessed parts to etch the translucent substrate. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
