| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To examine a CMP polishing agent for organic material, polishing a color filter layer to be uniform in thickness in a pixel by selectively polishing a step of the color filter layer to flatten the RGB surface of the color filter layer used in a liquid crystal display and having a high polishing speed. <P>SOLUTION: This CMP polishing agent for organic material contains cerium oxide particles, acrylic ester derivative and water, and preferably the mean particle diameter of the cerium oxide ranges from 0.01 to 20μm. <P>COPYRIGHT: (C)2006,JPO&NCIPI</p> |
