THIN FILM STRUCTURE, OPTICAL DEVICE, OPTICAL SWITCH AND VARIABLE OPTICAL ATTENUATOR

摘要

PROBLEM TO BE SOLVED: To hold the principal plane of a member to be supported at a predetermined non-parallel angle to the principal plane of a support base stably and with high accuracy. SOLUTION: This thin film structure includes: the support base 12b; a mirror 31 formed of a thin film and supported on the support base 12b; and an abut member 34 fixed to the mirror 31 and abutted on the support base 12b. The abut member 34 is fixed to the mirror 31 through a curved film member 36 and a connecting member 35. The abut member 34 is abutted on the support base 12b, whereby the principal plane of the mirror 31 is held at an angle of 90°to the principal plane of the support base 12b. COPYRIGHT: (C)2006,JPO&NCIPI