Semiconductor device, test apparatus and measurement method therefor

摘要

A semiconductor device for measuring delay time of a wiring under test provided therein is provided, wherein the semiconductor device includes: a loop path on which the wiring under test is provided; a delay element for delaying an input signal by a predetermined time; a delay selecting unit for determining whether or not the delay element is connected on the loop path; a loop delay measuring unit for measuring delay time of the loop path; a first gate delay estimating unit for estimating delay time of the delay element by subtracting delay time of the loop path in case the delay element is not connected on the loop path from delay time of the loop path in case the delay element is connected on the loop path; a second gate delay estimating unit for estimating delay time of a logic circuit connected on the loop path on the basis of the delay time of the delay element; and a wiring delay estimating unit for estimating delay time of the wiring under test.