| 摘要 |
The invention relates to a positioning apparatus (1) comprising a bottom carriage (4) that is disposed on a stationary base (2) and is mounted so as to be movable along a first axis (5), and a top carriage (6) which is placed on the bottom carriage (4) and is mounted so as to be movable along a second axis (7) that runs perpendicular to the first axis (5). In order to inject a laser beam (13) into a device (10) that is located on the top carriage, the bottom carriage (4) is provided with a first deflection element (20) which deflects a laser beam (13) that is directed onto the first deflection element (20) parallel to the first axis (5) in such a way that said laser beam (13) extends parallel to the second axis (7). A laser beam (13) that is deflected in this manner then impinges a second deflection element (21) which is associated with the top carriage (6). The second deflection element (21) deflects the laser beam (13) that is directed parallel to the second axis (7) such that the laser beam (13) runs parallel to the first axis (5) while injecting the laser beam (13) into a device (10) located on the top carriage (6). Said double orthogonal deflection of the laser beam (13) allows the laser beam (13) to be firmly anchored in the reference system of the positioning apparatus (1) or the device (10) located on the positioning apparatus (1). |
