发明名称 Surface acoustic wave device
摘要 A surface acoustic wave device is provided. The surface acoustic wave device includes a piezoelectric substrate and an IDT which is disposed on the piezoelectric substrate and made of Al or an alloy containing Al as a main component and using an SH wave as an excitation wave, wherein the piezoelectric substrate is a rotated Y-cut quartz plate having a cut angle theta set to a range of -64.0°<theta<-49.3° rotated counterclockwise from a Z crystalline axis and a propagation direction of a surface acoustic wave set to a direction of 90°±5° with respect to an X crystalline axis, wherein, when a wavelength of an excited surface acoustic wave is denoted by lambda, an electrode film thickness H/lambda normalized with wavelength of the IDT is set to a range of 0.04<H/lambda<0.12, and wherein, when a line occupancy rate mr of electrode fingers constituting the IDT is defined to be electrode finger width/(electrode finger width+electrode finger spacing), the line occupancy rate mr is set to a range of 0.53<=mr<=0.65.
申请公布号 US2006145568(A1) 申请公布日期 2006.07.06
申请号 US20050291910 申请日期 2005.12.02
申请人 EPSON TOYOCOM CORPORATION 发明人 MORITA TAKAO;OWAKI TAKUYA
分类号 H03H9/25 主分类号 H03H9/25
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