发明名称 TOPOTACTIC ANION EXCHANGE OXIDE FILMS AND METHOD OF PRODUCING THE SAME
摘要 This invention disclosure describes methods for the fabrication metal oxide films on surfaces by topotactic anion exchange, and laminate structures enabled by the method. A precursor metal-nonmetal film is deposited on the surface, and is subsequently oxidized via topotactic anion exchange to yield a topotactic metal-oxide product film. The structures include a metal-oxide layer(s) and/or a metal-nonmetal layer(s).
申请公布号 WO2006057826(A3) 申请公布日期 2006.07.06
申请号 WO2005US40923 申请日期 2005.11.11
申请人 ZURBUCHEN, MARK, A. 发明人 ZURBUCHEN, MARK, A.
分类号 C30B29/16;C30B25/18;H01L21/00 主分类号 C30B29/16
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