发明名称 CYLINDRICAL MASK STRUCTURE
摘要 <P>PROBLEM TO BE SOLVED: To provide a seamless mask structure which allows designing a continuous pattern in which small and large images such as dots and solid patterns are mixed and ensures high durability, with respect to a cylindrical seamless mask. <P>SOLUTION: The cylindrical mask structure comprises a continuous cylindrical substrate which is substantially transparent to an actinic ray and a mask material disposed on a substrate surface in a seamless state. <P>COPYRIGHT: (C)2006,JPO&NCIPI
申请公布号 JP2006178111(A) 申请公布日期 2006.07.06
申请号 JP20040370071 申请日期 2004.12.21
申请人 ASAHI KASEI CHEMICALS CORP 发明人 KAWAMOTO TADASHI
分类号 G03F1/00;G03F7/004;G03F7/20 主分类号 G03F1/00
代理机构 代理人
主权项
地址