| 摘要 |
PROBLEM TO BE SOLVED: To provide a dielectric constant measuring method for measuring a relative dielectric constant and a dielectric loss tangent of a dielectric thin film, a dielectric multilayer substrate and the like at high precision in a microwave band and a millimeter wave band, in particular, in a wave band of≥1 GHz. SOLUTION: The dielectric constant measuring method comprises using two resonators having dielectric specimens A1 and B1 sandwiched between opposite two conductors 4 and 5, finding the relative dielectric constant of a dielectric specimen A1 from a resonant frequency of a first resonator and finding the dielectric loss tangent of the dielectric specimen B1 from a resonant frequency and non-load Q of the second resonator. COPYRIGHT: (C)2006,JPO&NCIPI
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