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发明名称
METHOD FOR REDUCING CONTACT RESISTANCE BETWEEN TUNGSTEN PLUG AND COPPER INTERCONNECT
摘要
申请公布号
KR20060079318(A)
申请公布日期
2006.07.06
申请号
KR20040117084
申请日期
2004.12.30
申请人
MAGNACHIP SEMICONDUCTOR, LTD.
发明人
KIM, DONG JOON
分类号
H01L21/28
主分类号
H01L21/28
代理机构
代理人
主权项
地址
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