| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a system and a method of using a further effective distance sensor. <P>SOLUTION: There are provided an illumination system, a supporter constituted so as to support a patterning device, and a lithography device having a projection system. In a pixel grid imaging, images of a plurality of small optical spots are formed on a surface of a substrate by using a micro lens array (MLA). The notation in z location of the MLA can be adjusted to converge the focusing point of the spots on the surface of the substrate, and/or compensate a difference in height of the surface of the substrate. An adjustment of focusing is based on the output of an ultrasonic distance sensor provided in the vicinity of the surface of the substrate. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
