| 摘要 |
A laser processing apparatus and a laser processing method which can accurately converge processing laser light at a predetermined position are provided. In the laser processing apparatus, a condenser lens 31 converges processing laser light L 1 and rangefinding laser light L 2 onto an object to be processed 1 on the same axis. Here, light-converging point position control means 40 detects reflected light L 3 of the rangefinding laser light reflected by the front face 3 of the object 1 , and places a light-converging point P 1 of the processing laser light L 1 at a predetermined position. Since the processing by the processing laser light L 1 and the measurement of displacement of the front face 3 by the rangefinding laser light L 2 are carried out on the same axis as such, the light-converging point P 1 of processing laser light L 1 can be prevented from shifting from the predetermined position because of vibrations of the stage 21 and the like. Therefore, the processing laser light L 1 can accurately be converged at the predetermined position. |
